首页> 外国专利> OPTICAL FIBER FOR TRANSMITTING ULTRAVIOLET RAY, OPTICAL FIBER PROBE, AND METHOD OF MANUFACTURING THE OPTICAL FIBER AND OPTICAL FIBER PROBE

OPTICAL FIBER FOR TRANSMITTING ULTRAVIOLET RAY, OPTICAL FIBER PROBE, AND METHOD OF MANUFACTURING THE OPTICAL FIBER AND OPTICAL FIBER PROBE

机译:透射紫外线的光学纤维,光学纤维探针以及制造光学纤维和光学纤维探针的方法

摘要

It is an object of the present invention to provide an optical fiber for transmitting ultraviolet ray which has an improve transmittance and is prevented from deterioration by ultraviolet ray with which it is irradiated. It is another object of the present invention to provide an optical fiber probe which can propagate vacuum ultraviolet ray and deep ultraviolet ray at a high transmittance, is deteriorated only to a limited extent when irradiated with ultraviolet ray and can be etched to have a desired shape of the sharpened section at the fiber end.;The present invention provides the optical fiber for transmitting ultraviolet ray which has a core 5 of silica glass containing a given content of fluorine and a clad 6a of silica glass containing a given content of fluorine or boron, a clad 6b of a resin which transmits ultraviolet ray or a clad 6c having air holes H. The clad may be coated with a protective layer and further with a covered layer for protection. In particular, the core, clad and protective layer have a high transmittance for ultraviolet ray and resistance to ultraviolet ray with which they are irradiated, when treated with hydrogen.;An optical fiber probe 1 has an optical fiber 2 provided with a sharpened section 3 at the end, which is sharpened with an etchant solution, the sharpened section 3 being coated with a light-shielding metallic film 4.
机译:本发明的一个目的是提供一种用于透射紫外线的光纤,该光纤具有改善的透射率并且可以防止由于被紫外线照射而劣化。本发明的另一个目的是提供一种光纤探针,该光纤探针能够以高透射率传播真空紫外线和深紫外线,在受到紫外线照射时仅在有限的程度上劣化,并且能够被蚀刻成期望的形状。本发明提供了一种用于传输紫外线的光纤,该光纤具有含有给定氟含量的石英玻璃芯5和含有给定氟或硼含量的石英玻璃包层6a。例如,可以是透射紫外线的树脂包层6b或具有气孔H的包层6c。该包层可以覆盖有保护层,并且还覆盖有用于保护的覆盖层。特别地,当用氢处理时,芯,包层和保护层具有高的紫外线透射率和被其照射的抗紫外线性。光纤探针1具有设置有尖锐部分3的光纤2。最后,用蚀刻剂溶液将其尖锐化,在尖锐部分3上涂上一层遮光金属膜4。

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