Pulse driving method gas sensor using the differently of thermal conductance of layer

摘要

PURPOSE: A process for manufacturing gas sensor is provided to reduce power consumption by improving thermal characteristics of the sensor. CONSTITUTION: A process for manufacturing gas sensor, comprises a first step of forming a thermal shield layer which is made of a glass material having a high thermal resistance, onto an alumina substrate in such a manner that the thermal shield layer has a thickness of 30 to 200 micron meters; and a second step of forming a resistor and a catalyst layer onto the resultant structure. The heat shut by the thermal shield layer is instantaneously transferred upward to the catalyst layer when the pulse is turned on, and gradually radiated to the alumina substrate when the pulse is turned off. Thus, heat is transferred to the catalyst layer in a concentrative manner during an instantaneous heating operation, to thereby improve thermal characteristics.