High efficient-atmospheric microwave plasma system

摘要

PURPOSE: A high efficiency atmospheric pressure microwave plasma system is provided to increase the efficiency of the energy transmission by having the double resonance structure and inserting the resonance tuner into the resonance. CONSTITUTION: A high efficiency atmospheric pressure microwave plasma system includes a power block(202), a magnetron(204), a controller(206), an isolator(208), a directional coupler(210), a triple rod tuner(212), a plasma reaction block(220) and an automatic transfer system(230). The plasma reaction block(220) includes a first resonator(221), a second resonator(222), a plasma reaction tube(223) and a resonance tube(224). The high efficiency atmospheric pressure microwave plasma system is capable of exciting various modes in response to the hole to transmit the energy from the first resonator(221) to the second resonator(222) or the position or the type of the antenna.