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Container of workpeace and apparatus for opening or closing the container of workpeace
Container of workpeace and apparatus for opening or closing the container of workpeace
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机译:工作场所容器和用于打开或关闭工作场所容器的设备
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摘要
PURPOSE: A workpiece receiving vessel and an opening/closing device for the same are provided to facilitate the opening work of a FOUP(front open unified pod), to reduce operating errors during opening/closing works, and to improve productivity of semiconductor devices by virtue of a reduction in a time required to perform opening/closing works. CONSTITUTION: The workpiece receiving vessel comprises a container configured to be opened at one surface thereof, a cover(104) for sealing the surface of the container to be opened, a locking unit formed at the cover, the locking unit having a bar(200) protruding outward from the cover and an elastic member(204) connected to the bar, the bar being moved by the deformation of the elastic member, and a frame unit having an insertion groove into which the protruded bar is inserted.
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