A Method for Depositing Diamond Films Without Fracture by a Control of Substrate Temperatures Using Powders

摘要

PURPOSE: A method and an apparatus for manufacturing a diamond film are provided to manufacture a diamond film which is not damaged by accurately controlling temperature of a substrate, thus preventing temperature increase of the substrate during deposition and minimizing temperature gradient on the substrate horizontal surface. CONSTITUTION: In a method for manufacturing diamond film by vapor deposition, the method comprises the process of forming a power layer(9) having fluidity between a substrate(4) on which the diamond film is deposited and a substrate holder(5) so that the power layer(9) is used as a heat transfer medium between the substrate(4) and the substrate holder(5), wherein the powder layer(9) is consisted of a metal or ceramic powder, powder composing the powder layer is powder particles having a diameter of 1 mm or less, a separating preventing member such as a ring is formed on the outer side of the contact part between the substrate and the substrate holder to prevent external separation of the powder layer. The apparatus for manufacturing a diamond film by vapor deposition comprises a substrate on which the diamond film is deposited, a substrate holder holding the substrate, and a vacuum vessel receiving the substrate and substrate holder and connected to a plasma generating equipment, wherein the apparatus further comprises a powder layer formed between the substrate and the substrate holder.