METHOD FOR PRODUCING TUNGSTEN SUPER FINE PARTICLE AND NANO-CRYSTAL MEMBRANE

摘要

A particle of W oxide 2 such as a particle of WO3 is disposed on an amorphous carbon support film 1, onto the particle of W oxide 2 in an atmosphere of high vacuum an electron beam of an intensity of 1023 to 1024 e/cm2.sec being irradiated. Due to the irradiation of an electron beam 3 of such an intensity, ultra fine particles of W 4 of a particle diameter of for instance 10 nm or less are generated. The ultra fine particles of W consist of W effected to detach from the particle of W oxide. IMAGE