Method of fabricating polymer optical waveguide and method of fabricating hybrid integrated device using the same

摘要

PURPOSE: A method for fabricating polymer waveguide and method for fabricating hybrid integrated device using the same are provided which fabricate an optical device simply with a low cost without a polishing process and a dry etching process after cutting, and a method for fabricating a hybrid integrated device using the same. CONSTITUTION: According to the method for fabricating the polymer waveguide(100), a flat substrate(10) is prepared, and then a bottom clad layer comprising the first polymer is formed on a region of the substrate. And a core layer comprising the second polymer having a refractive index larger than the first polymer is formed on a region on the bottom clad layer. And a top clad layer comprising the third polymer having a refractive index smaller than the second polymer is formed on the bottom clad layer and on the core layer. The substrate is formed with a silicon, a glass or a polymer.