Variable coating thickness revise device of a vacuum mult coater for lens coating

摘要

The present invention is a coating chamber equipped with an electron gun that uses an evaporation source for evaporation of the evaporation material in a vacuum to vaporize the coating on the lens, and a plurality of lenses on the coating lens mounting rotating plate mounted on the upper part of the coating chamber. Coating film of different thickness of high refractive index and low refractive index coating material in the lens mounted on the coating lens mounting rotating plate, especially for coating the deposition material on the lens front of the coating lens mounting rotating plate with electron gun When the film is deposited, the fixed thickness compensator is mounted on the underside of the coated lens mounting rotating plate, and in addition, the variable thickness compensator allows the thickness of the two coating materials to be deposited uniformly over the entire coating lens mounting rotating plate. Reliability of the product is reduced and product reliability is provided by providing high quality lens The present invention relates to a variable coating thickness compensator in a lens coating vacuum evaporator capable of increasing safety and protecting eyesight. The electron gun 400 is mounted under a coating chamber 110 in a predetermined space, and the coating chamber ( The coating lens mounting rotating plate 120 is mounted on the coating lens mounting rotating frame 500 rotatable by the driving source on the upper part of 110, and the thickness of the coating film is compensated for in the radial direction of the coating lens mounting rotating plate 120. In order to form a fixed thickness correction plate 700 directly under the coating lens mounting rotary plate (120). However, due to the difference in the material properties of the deposition material, each deposition material is evaporated inside the chamber of the vacuum evaporator, so that the distribution of coating amount is different depending on the position of the lens mounted on the coating lens mounting rotary plate 120. At 700, it becomes impossible to correct the difference in the thickness distribution. To compensate for this, by forming a variable thickness compensation plate 800 that can be folded and expanded freely and separately from the fixed thickness compensation plate 700, and when depositing a high refractive index deposition material, the variable thickness compensation plate 700 is folded down and deposited. When depositing the low refractive index deposition material, the variable thickness compensator 700 is spread upward to correct the difference in the coating amount distribution according to the deposition material so that the high refractive index / low refractive index material is applied to the lenses of the coated lens mounting rotating plate 120. All of the deposition films by different deposition materials are formed to be deposited to a constant thickness.