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Resonant scanner has drive formed from stator electrode and coil, for exerting force directly onto drive plate, with periodic function adapted to resonant frequency of mirror
Resonant scanner has drive formed from stator electrode and coil, for exerting force directly onto drive plate, with periodic function adapted to resonant frequency of mirror
A drive plate (4) within a frame (3) is fixed by two torsion springs (6) so that it can oscillate about a torsion axis (8). A mirror (5) is fixed by two further torsion springs (7) so that is can oscillate about a torsion axis (9). A stator electrode (15) and coil (24) are arranged to form a drive on the base (11) of the stator part (2), to exert a force directly on the drive plate. The force follows a periodic function whose period is adapted to the resonant frequency of the mirror, which is different from the resonant frequency of the drive plate.
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