Apparatus for heating substrates comprises emitters for emitting electromagnetic waves, reflectors for (in)directly directing electromagnetic radiation released by emitters onto substrate, and rigid or adjustable screens

摘要

An apparatus for heating substrates comprises one or more emitters (1) for emitting electromagnetic waves in the region of 200-10000 nm; one or more reflectors (2) for (in)directly directing the electromagnetic radiation released by the emitters onto a substrate; and one or more rigid or adjustable screens (3) for electromagnetic radiation released by the emitters and/or reflectors in the direction of the substrate. Preferred Features: The width of the energy distribution of a homogeneous beam is in the region of 0.1-150, preferably 1-100, especially 4-60 mm, and the length of the energy distribution of a homogeneous beam is in the region of 0.1 mm -10 m, preferably 10 mm - 8 m, especially 20 mm - 6 m. The screens are mechanically, electrically, hydraulically and/or pneumatically adjusted. The screens have various geometries. The reflectors have a polygonal cross-section.