首页> 外国专利> Apparatus and method for determining the orientation of a crystallographic plane relative to the crystal surface and apparatus and method for the separation of a single crystal in a cutting-off machine

Apparatus and method for determining the orientation of a crystallographic plane relative to the crystal surface and apparatus and method for the separation of a single crystal in a cutting-off machine

机译:用于确定晶体平面相对于晶体表面的取向的设备和方法以及用于在切割机中分离单晶的设备和方法

摘要

The invention relates to a device and a method for determining the orientation of a crystallographic plane (100) in relation to a crystal surface (2). Said method permits an orientation, in which adhesive defects of the crystal or contamination of the fixing elements for the crystal are eliminated. To achieve this, the angle, which is formed by the crystal surface to be measured and a reference axis and the angle, which is formed by the crystallographic plane and the reference axis, are measured and a differential is calculated. The required correction is subsequently made in a wire-saw device comprising an X-Y positioning unit, by means of the measurement of the orientation and the horizontal and vertical positions of the crystal are adjusted. This ensures that an additional degree of rotational freedom remains for the crystal on the cutting plane, to achieve a cut devoid of forces perpendicular to the feed direction and wire direction, so that the tools are not deflected and the cutting forces are minimal. The orientation accuracy is also increased.
机译:本发明涉及一种用于确定晶体平面(100)相对于晶体表面(2)的取向的装置和方法。所述方法允许取向,其中消除了晶体的粘合缺陷或晶体的固定元件的污染。为此,测量由待测晶体表面和参考轴形成的角度以及由晶体学平面和参考轴形成的角度,并计算差值。随后,在包括X-Y定位单元的线锯设备中进行所需的校正,方法是通过测量方向和调整晶体的水平和垂直位置。这确保了在切割平面上为晶体保留了额外的旋转自由度,以实现没有垂直于进给方向和线材方向的力的切割,从而使刀具不偏斜并且切割力最小。定向精度也提高了。

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