Production of a controlled deformable functional element comprises applying an actuator on an exposed metallic material surface of a metallic substrate, and surrounding the actuator

摘要

Production of a controlled deformable functional element (1) comprises applying an actuator (4) on an exposed metallic material surface (3) of a metallic substrate (2); and surrounding the actuator apart from the contact connections with a metallic material in a metal deposition process. An Independent claim is also included for the controlled deformable functional element produced. Preferred Features: A metallic layer free from inner mechanical stresses is formed on the metallic substrate. A number of actuators are evenly distributed on the exposed metallic material surface. A PVD or CVD process is used as the metal deposition process.