Parameter determining method e.g. for titanium deposition rate, involves comparing experimental verification result of substrate hole edge covering titanium layers, with table of simulated parameters for hole

摘要

The metal atoms and ions in the argon plasma are transported on a substrate (2). The coverage of the edge of the substrate hole with titanium layers (1a,1b), is verified experimentally by imaging the titanium layers. The result of the verification is compared with the compiled variant tables of relevant simulated deposition parameters for the substrate hole.