Flue gas purification device used for purifying hydrides in contaminated flue gas streams in manufacture of semiconductor products contains several filters having chemisorption action

摘要

Flue gas purification device contains several filters having a chemisorption action. An Independent claim is also included for the purification of a flue gas contaminated with hydrides using the above device. Preferred Features: The filters comprise several parallel and/or serially arranged filter elements, in which a part of the filter elements is joined as a pre-filter to the subsequent main filter elements. The filter material is made from activated charcoal coated with silver nitrate.