Making closed micromechanical component includes lead-out formed by track in depression coated with insulant.

摘要

In a surface of the first substrate (11), a depression (14) is formed for a recessed track (15). This is covered by insulant (16). The track passes under the substrate and through a contact location (17) to make a connection between the interior (13) and exterior. An Independent claim is included for a micromechanical component with a closed interior, assembled as described.