Production of high-density polyidimide film, by decomposing substance with idimine bond into molecules through application of plasma under low-pressure environment, producing activated species, and performing polymerization

摘要

A high-density polyidimide film is produced by applying a plasma to provide an energy level under low-pressure vacuum for the decomposition of the substance with an idimine bond into molecules; producing an activated species (ionic bond or radical) by extracting hydrogen; and performing polymerization again to form a non-solidified high-density polyidimide film on a clad laminator. Production of a high-density polyidimide (HPI) film includes providing a clad laminator tool, a vacuum cavity, a raw material supplying mechanism and an energy supplier for forming a manufacturing equipment; using a substance containing an idimine bond as initial material; applying a plasma to provide an energy level under low-pressure vacuum for the decomposition of the substance into molecules; then, producing an activated species (ionic bond or radical) by extracting hydrogen; and then, performing polymerization again to form a non-solidified HPI film on a clad laminator. An Independent claim is included for a manufacturing equipment for producing the high-density polyidimide, comprising a vacuum cavity (201) for providing a low-pressure environment of at most 20 torr as a container for the reaction; a raw material supplying mechanism for supplying raw material that contains the substance with idimide bond; an energy supplier (203) disposed in the vacuum cavity to provide energy for the decomposition, repeated decomposition, and recombination of the raw material; and a clad laminator tool (206) being disposed in the vacuum cavity for fixing the clad laminator (205) in position.