首页> 外国专利> Automatic scattered light inspection of optical lenses and crystal to detect internal defects, whereby an inspection and evaluation component is arranged at an angle to an incident test beam that passes through the test piece

Automatic scattered light inspection of optical lenses and crystal to detect internal defects, whereby an inspection and evaluation component is arranged at an angle to an incident test beam that passes through the test piece

机译:对光学透镜和晶体进行自动散射光检查,以检测内部缺陷,从而将检查和评估组件与通过测试片的入射测试光束成一定角度布置

摘要

Method for scattered light inspection of transparent test pieces in which a test light beam (2) is directed through the test piece from an inlet surface (5) to an outlet surface (7). Light scattered from an inspection area (9) that coincides with the test beam direction is detected by an inspection and evaluation component (8) that is arranged at angle to the incident test beam. An Independent claim is included for an inspection device.
机译:用于透明测试件的散射光检查的方法,其中将测试光束(2)从入口表面(5)引导到出口表面(7)穿过测试件。从与检查光束方向一致的检查区域(9)散射的光由检查和评估组件(8)检测,检查和评估组件与入射的测试光束成一定角度排列。检查设备包括独立索赔。

著录项

  • 公开/公告号DE10210209A1

    专利类型

  • 公开/公告日2003-09-11

    原文格式PDF

  • 申请/专利权人 CARL ZEISS SMT AG;

    申请/专利号DE2002110209

  • 发明设计人 GERHARD MICHAEL;

    申请日2002-03-01

  • 分类号G01N21/47;

  • 国家 DE

  • 入库时间 2022-08-21 23:42:05

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