Excimer laser circuitry, includes energy recovery unit with second storage condenser connected in line between first storage condenser and thyratron

摘要

An energy recovery unit (D2, L1) makes any energy not converted between the two electrodes (E1, E2) of the discharge path during laser ignition, at least partially available for the next ignition. The energy recovery unit is coupled to the line between the first storage condenser (C2) and the thyratron. A second storage condenser (C1), is connected in parallel with the energy recovery unit. An Independent claim is included for the corresponding method of operation.