Micro manipulator for semiconductor integrated circuit manufacture/inspection, has three-link mechanisms fabricated into single unit, by cutting and folding sheet of flexible metal plate

摘要

A three-link mechanism (6) connects a base (2) and end effector (3) and performs parallel three-degree-of-freedom (3-DOF) operation. The three-link mechanism are fabricated into single unit, by cutting and folding a sheet of flexible metal plate.