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Photolithography illumination of biological matter uses an elastic mirror surface with controlled distortion to give structured diffracted light for illuminated and unlit zones at the target surface
Photolithography illumination of biological matter uses an elastic mirror surface with controlled distortion to give structured diffracted light for illuminated and unlit zones at the target surface
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机译:生物物质的光刻照明使用具有受控变形的弹性镜面为目标表面的照明和非照明区域提供结构化的衍射光。
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摘要
Apparatus for photolithography illumination of biological matter having at least one light source (A) and a phase grid which can be modulated as an elastic mirror surface (H), is new. The mirror surface is distorted locally to give structured mirror zones (K) and unaffected mirror zones (J). The light source gives monochrome or continuous light in a wavelength range of 100-800 nm using a laser, light emitting diode, metal vapor lamp, gas discharge lamp, incandescent lamp or an arc lamp. The matter to be illuminated is on a carrier (C), such as a DNA chip, PNA chip or a peptide chip. The elastic mirror surface is a surface light modulator (SLM), containing classic semiconductor technology through a micromechanical application, operated by an electronic control (I). The apparatus also has at least one detector to register the illumination and/or reflected light from the target material and/or fluorescence generated by the light. The light is directed to the detector(s) by a mirror and/or an assembly of separate mirrors with individual control and/or an elastic mirror surface and/or glass fiber bundles. The target points of the elastic mirror surface are aligned at dedicated glass fibers or glass fiber bundles for each point. An optical system is between the elastic mirror surface and the carrier, to form the required light pattern on the reaction carrier. The light source emits a spectrum of wavelengths to unmask nucleotides and the like, and peptide nucleic acid components for chain extension and develop oligomers. The light is passed to the substrate through a modulated phase grid as an elastic mirror surface, where the local distortions are formed by voltage-controlled setting electrodes, to give a structured diffraction (G) with structured unlit zones (E) at the substrate where there is oligomer synthesis. Other light is diffracted (F) to illuminate zones (D) at the substrate which is in a precise and rigid position. The solid phase, with the oligomer synthesis, is in a chamber containing other units to supply the required solutions for the synthesis of DNA or PNA and/or reagents, to be applied to the solid phase. The solid phase with the oligomer synthesis is on a separate carrier. An independent claim is included for the operation of the photolithography illumination of biological matter using an elastic mirror surface, which is distorted to give targeted illuminated points at the material, with an illumination pattern set by an electronic control. After a successful oligomerizing on the DNA or PNA chip, a hybridizing action is effected with a target DNA.
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