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Dielectric interference - a filter system, a lcd - display and ccd - arrangement as well as a process for the preparation of a dielectric interference - filter system

机译:介电干扰-滤波器系统,液晶显示器-CCD和装置以及制备介电干扰的方法-滤波器系统

摘要

A dielectric interference filter system with at least filter elements of different spectral characteristics on the same carrier substrate is provided. The filter elements have the same height and/or adjoin each other without gaps. The system is used for, inter alia, interference color filter systems in the form of an LCD-display or CCD-arrangement. A process for manufacturing the system includes preparing at least one filter element by coating and subsequent etching, and preparing at least one subsequent filter element by coating and subsequent structuring utilizing lift-off in which the etching mask is used as the lift-off mask.
机译:提供了一种在同一载体衬底上至少具有不同光谱特性的滤波器元件的介电干扰滤波器系统。过滤元件具有相同的高度和/或没有间隙地彼此邻接。该系统尤其用于LCD显示器或CCD装置形式的干涉滤色器系统。一种用于制造该系统的方法,包括通过涂覆和随后的蚀刻制备至少一个过滤元件,以及通过涂覆和随后的结构利用剥离工艺制备至少一个后续的过滤元件,其中蚀刻掩模用作剥离掩模。

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