NETHERLANDS COHERENCE INTERFEROMETRIC COUNCIL

摘要

Low coherence interferometer apparatus for investigation of a sample (15), in particular for multi-dimensional imaging, having an interferometer configuration (2) comprising a low coherence light source, a probe head (9) having a light exit opening (16) for irradiating light into the sample, an optical coupler, a reference reflector and a detector (13). The optical paths between the elements of the interferometer configuration (2) form interferometer arms. The optical coupler and the reference arm of the interferometer configuration (2) are integrated into a common optical chip (28). In addition to the reference reflector (11), the reference arm comprises a deflection reflector (33) formed on an end surface (35) of the optical chip (28) in such a manner that the reference light is cross-coupled between a first light guide (10a) forming a first portion of the reference arm (10) and a second light guide (10b) forming a second portion of the reference arm (10).