Multi-functional device for homogeneous treatment of substrates comprises energy controlled homogeneous beam of ions from source of ions coupled to single type ion extractor

摘要

A multi-functional device for the homogeneous treatment of substrates (100) by an energy controlled homogeneous beam of ions from a source of ions (1) coupled to an extractor (2) able to extract one type of ions from several with a predetermined intensity comprises: (a) a line for transporting the ions in the form of a homogeneous beam (3), formed from optical, electrostatic and/or magnetic elements; (b) a magnetic system (6) for sorting the ions; (c) a system (12) for sweeping the slice to be treated; (d) a mechanism (10) for the gentle deceleration of the beam of ions to a determined kinetic energy in the proximity of the slice; (e) a device (11) for neutralizing the charges induced on the slice arrange close to the slice; and (f) some components for controlling the homogeneity of the beam, the parameters of the beam of ions and the mechanical sweeping parameters of the slice.