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NOVEL METHODS WITH ADVANCED OPTICAL EFFECTS FOR THE PRODUCTION OF PHOTO-SENSITIVE POLYMERIC NANOSTRUCTURES APPLICATIONS TO NANOPHOTOLITHOGRAPHY AND STORAGE OF VERY HIGH DENSITY INFORMATION
NOVEL METHODS WITH ADVANCED OPTICAL EFFECTS FOR THE PRODUCTION OF PHOTO-SENSITIVE POLYMERIC NANOSTRUCTURES APPLICATIONS TO NANOPHOTOLITHOGRAPHY AND STORAGE OF VERY HIGH DENSITY INFORMATION
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机译:具有先进光学效应的新型光敏聚合物纳米结构的生产方法在纳米光照相术和存储非常高密度信息中的应用
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摘要
The invention concerns production of nanostructures on polymers for applications in nanophotolithography and high-density data storage. The corresponding nanoobjects are obtained through improved tip optical effects, the tips acting as so-called opening-free nanosources. The novel techniques of local photopolymerisation are also used to photoinduce in specific polymers non-linear, photoluminescent and locally conductive or insulating properties. The applications in nanophotolithography also concerns integrated electro-optical functions, source matrices, and more generally a wide variety of substrates for use in nanoelectronics.
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