OPTICAL MICRO-SHAPING APPARATUS EQUIPPED WITH FOCAL POSITION CONFIRMING FUNCTION

摘要

PROBLEM TO BE SOLVED: To provide an optical micro-shaping apparatus capable of precisely positioning an optical micro-shaping focus point in a technique for obtaining a three-dimensional shaped article while irradiating the desired point in a photo-setting resin liquid layer with a laser beam.;SOLUTION: The optical micro-shaping apparatus has a laser optical system for performing the internal irradiation of the photo-setting resin liquid layer 16 with the laser beam from a laser beam source. A mark becoming a standard for alignment is arranged on the surface of cover glass 15 and/or a glass substrate 17 so as to be two-dimensionally distributed and the optical micro-shaping focus point is located based on the position of the mark.;COPYRIGHT: (C)2004,JPO&NCIPI