POLYURETHANE FOAM FOR POLISHING SHEET AND METHOD FOR PRODUCING THE SAME, POLISHING SHEET FOR POLISHING PAD, AND POLISHING PAD

摘要

PROBLEM TO BE SOLVED: To provide a polyurethane foam which is used for polishing sheets and has large distributed pore diameters without using expanded fine hollow spheres or thermally expandable fine hollow spheres, to provide a method for producing the same, to provide a polishing sheet, and to provide a polishing pad which uses the polyurethane foam, can hold a number of abrasive grains on a polishing surface, and can polish at a high polishing speed.;SOLUTION: This polyurethane foam for the polishing sheets, using the first component containing an isocyanate group-containing compound and the second component containing an active hydrogen group-containing compound as main components, is characterized by further containing at least one modified silicone surfactant selected from the group consisting of polyether-modified silicone oils, ester-modified silicone oils, epoxy-modified silicone oils, carbinol-modified silicone oils, phenol-modified silicone oils, mercapto-modified silicone oils, amino-modified silicone oils, and carboxy-modified silicone oils.;COPYRIGHT: (C)2004,JPO