SOLUTION JETTING APPARATUS AND METHOD FOR JETTING SOLUTION

摘要

PROBLEM TO BE SOLVED: To jet a solution to efficiently deposit it onto only an aimed position with high accuracy.;SOLUTION: A transparent substrate 2 having a plurality of surrounded regions surrounded by barrier walls arranged on one surface of the substrate is mounted on a worktable 1. The transparent substrate 2 and the atmosphere above are heated by a heater 68, while a nozzle 65 is cooled by supplying a cooling medium to a cooling medium jacket 69A from a cooling medium supplier 70A, all controlled by a controller 73A. The nozzle 65 and the transparent substrate 2 are relatively moved, the solution in a tank 66 is supplied to the nozzle 65, drops of the solution are continuously jetted from a jetting port 65a, and while the drops are heated, they reach at the surrounded regions of the heated transparent substrate 2.;COPYRIGHT: (C)2004,JPO&NCIPI