SENSOR DEVICE FOR DETECTING DISSOLVED HYDROCARBON GAS IN OIL-FILLED HIGH-VOLTAGE ELECTRICAL EQUIPMENT

摘要

PROBLEM TO BE SOLVED: To provide a multi gas sensor device 10 for detecting dissolved hydrocarbon gas in an oil-filled electrical equipment.;SOLUTION: A semiconductor substrate 14 comprises one selected from the group of GaN, SiC, AlN, InN, AlGaN, InGaN, and AlInGaN. In this method for sensing the gas in an oil reservoir filled with an oil for the electrical equipment, the sensor device 10 is provided, the sensor device 10 is immersed into the oil reservoir, the gas discharged from the oil is interacted with one or more of catalysis metal gate electrode(s) 16, the gas is changed along with contact of the gas with the catalysis metal gate electrode(s) 16, and sensitivity of a sensor is changed.;COPYRIGHT: (C)2004,JPO&NCIPI