DEFECT DETECTOR, DEFECT DETECTING METHOD, OUTLINE EXTRACTING METHOD, OUTLINE SMOOTHING METHOD, REGION COMBINING METHOD, AND PROGRAM

摘要

PPROBLEM TO BE SOLVED: To provide a defect detector for preventing defects on a substrate from being missed while performing image processing at high speed. PSOLUTION: A control part 2 of the defect detector is provided with a reference mask generating part 200, an inspection mask generating part 201, and a defect detecting part 202. Based on an image (inspection image data 102) obtained by imaging a substrate under inspection, the generating part 201 performs outline smoothing process for a pad pattern to be inspected and generates inspection mask data 103 by finding a logical sum of reference mask data 101 generated by the generating part 200. In this way, the image data 102 is inspected based on the generated mask data 103. Further, region combination is performed on once detected defects by a defect detecting part 202, and if the defects are close-packed, they are detected as defects even if the defects are minute, and defect data 105 is produced. PCOPYRIGHT: (C)2004,JPO