ELECTRONIC BEAM PROCESSING METHOD AND ELECTRONIC BEAM PROCESSING SYSTEM

摘要

PPROBLEM TO BE SOLVED: To provide an electron beam processing method and an electron beam processing system in which deterioration in the k value of an insulating film and lowering of chemical resistance can be suppressed. PSOLUTION: In the method for processing an organic material film formed on the surface of an article being processed using an electron beam, the organic material film is irradiated with an electron beam through hydrocarbon radial formation gas. PCOPYRIGHT: (C)2005,JPO&NCIPI