BIS(BIS(HYDROXYPHENYL)CYCLOHEXYL)ALKANE TETRAHYDROPYRANYL ETHERS

摘要

PROBLEM TO BE SOLVED: To provide novel bis(bis(hydroxyphenyl)cyclohexyl)alkane tetrahydropyranyl ethers usable as a photosensitizer in a photosensitive resist composition, and a dissolution inhibitor or the like.;SOLUTION: The bis(bis(hydroxyphenyl)cyclohexyl)alkane tetrahydropyranyl ethers are represented by general formula (I), where R is a tetrahydropyranyl group; R₁ is an alkyl group; R₂ and R₃ are each independently a hydrogen atom or an alkyl group; and m is 0, 1 or 2.;COPYRIGHT: (C)2004,JPO