TRANSMISSIVE TYPE ELECTROMECHANICAL OPTICAL SWITCH ELEMENT AND SWITCH ARRAY OF THE SAME

摘要

PROBLEM TO BE SOLVED: To provide a transmissive type electromechanical optical switch element which has a simple structure and is easily manufactured.;SOLUTION: The transmissive type electromechanical optical switch element is composed of a transparent substrate 10 provided with a transparent electrode 14, a tilted thin film transparent beam 12 having a hollow structure, which is at least supported at the both ends on the transparent substrate 10, and a movable electrode 16 provided with in a region near a light transmission region on the thin film transparent beam 12, and the thin film transparent beam 12 is tilted and moved with an electrostatic force when a voltage is applied between the transparent electrode 14 and the movable electrode 16.;COPYRIGHT: (C)2004,JPO&NCIPI