LATTICE CONSTANT DETERMINATION METHOD AND MATERIAL EVALUATION METHOD USING THE SAME

摘要

PPROBLEM TO BE SOLVED: To provide a method for rapidly and easily determining the lattice constant of any material such as a polycrystalline material, and a method for rapidly evaluating the stress and strain of the material. PSOLUTION: By varying the lattice constant of a standard specimen in a specified range, the HOLZ line pattern of the standard specimen is provided by a calculation using an expression (y = f (x, a) = (a) x + (a)), the data is accumulated, and a data library is constructed. On the other hand, the evaluated specimen is radiated/scanned with a convergent electron beam, the developed HOLZ line pattern is collated with the pattern data library to select the mostly matching HOLZ line pattern. The lattice constant of the measured specimen is determined from the lattice constant data of the data library having the HOLZ line pattern. Also, the distributed state of stress and strain in the specimen can be two-dimensionally mapped from the determined lattice constant. PCOPYRIGHT: (C)2004,JPO