SUBSTRATE FOR ANALYZING POLYMER, ARRAY FOR ANALYZING POLYMER AND POLYMER ANALYZING METHOD

摘要

PROBLEM TO BE SOLVED: To make performable an analysis accurately with high sensitivity by regulating the content of impurities and to make performable an analysis by accurately recognizing an analyzing target position.;SOLUTION: In a polymer analyzing method of analyzing a polymer to be analyzed formed on a substrate using laser aberration, the content of a labelled element in a substrate material is set to be ≤ 1 ppm and position information is formed on a polymer part and/or a substrate.;COPYRIGHT: (C)2004,JPO&NCIPI