SYSTEM AND METHOD FOR CORRECTION OF SPATIAL CROSS-TALK AND PATTERN FRAME EFFECT IN IMAGING SYSTEM

摘要

PROBLEM TO BE SOLVED: To reduce coherence of an illumination field and an modulated illumination field.;SOLUTION: An imaging system is disclosed that includes an illumination source, a diffractive modulator, an imaging optical device, and a coherence reduction system. The illumination source is for producing the illumination field. The diffractive modulator is for receiving at least a partially coherent illumination field and producing the modulated illumination field. The imaging optical device is for directing the modulated illumination field toward an imaging surface.;COPYRIGHT: (C)2004,JPO&NCIPI