AC SURFACE PHOTOVOLTAIC MEASURING APPARATUS AND NON-DESTRUCTIVE IMPURITY CONCENTRATION MEASURING METHOD OF SEMICONDUCTOR SURFACE USING IT

摘要

PROBLEM TO BE SOLVED: To provide a reliable AC surface photovoltaic measuring apparatus at low cost and a non-destructive impurity concentration measuring method of a semiconductor surface by using the photovoltaic measuring apparatus for measuring a frequency (f) dependency of SPV focusing on generation of acSPV and only on a part of the measuring apparatus.;SOLUTION: The AC surface photovoltaic measuring apparatus includes a test piece table 4, an Si wafer 5 set on the test piece table 4, an electrode fixing plate 6 having a transparent electrode 8 applied with an AC SPV signal and provided with a prescribed space above the Si wafer 5, an irradiating means for casting interrupting light (light beam) 10 onto the Si wafer 5, and a scanning mechanism having a X- and Y-axis driving motor for the irradiating means.;COPYRIGHT: (C)2004,JPO