FIDUCIAL MARK AND ALIGNER HAVING IT

摘要

PROBLEM TO BE SOLVED: To provide a fiducial mark suitable for detecting a mark position accurately and an aligner having such a mark.;SOLUTION: A substrate 1 is composed of ceramics having a low linear expansion coefficient and a surface film 2 is deposited on the substrate. The surface 3 of the surface film 2 is subjected to the grinding process beforehand and a fiducial mark is dug, as mask patterns 4 and 5, into the surface 3 of the surface film or projected therefrom.;COPYRIGHT: (C)2004,JPO