OIL FILM THICKNESS CALIBRATION DEVICE, OIL FILM THICKNESS CALIBRATION METHOD, OIL FILM THICKNESS MEASURING DEVICE, AND OIL FILM THICKNESS MEASURING METHOD

摘要

PROBLEM TO BE SOLVED: To provide an oil film thickness calibration device which accurately measures the thickness of an oil film, in calibrating fluorescent light and the thickness of the oil film, in the oil film thickness measurement using a fluorescent phenomenon.;SOLUTION: The oil film thickness calibration device having a substrate 3, space forming bodies 4+5, and attachment hoders 2+7 is used. The substrate 3 has a first surface as a flat surface. The space forming bodies 4+5 form a space having a prescribed thickness on the first surface, in which transmitted light can reach the space. The attachment holders 2+7 fix the space forming bodies 4+5 to the substrate 3. The space forming bodies 4+5 include a support part 4 provided on the first surface and an on-space upper lid 5 in which at least a part thereof is on the support part 4 and which forms the space between it and the first surface. The oil 10 for measuring the film thickness is put into the space.;COPYRIGHT: (C)2004,JPO