MILLER DEVICE, OPTICAL SWITCH, ELECTRONIC EQUIPMENT, AND METHOD FOR DRIVING MILLER DEVICE

摘要

PROBLEM TO BE SOLVED: To provide a mirror device capable of rotating a mirror without deviating the rotational axis of the mirror, and to provide an optical switch, electronic equipment, and a method for driving the mirror device.;SOLUTION: The mirror device is constituted so that for a 1st supporting substrate 2 for supporting a mirror substrate 1 from the lower side, an electrode 11 is positioned on an opposite position to the end part of a mirror 4 on the one direction side of a mirror rotating direction and an electrode 12 is positioned on an opposite position to the end part of the mirror 4 on the reverse direction to the one direction side of the mirror rotating direction. For a 2nd supporting substrate 3 for supporting the mirror substrate 1 from the upper side, an electrode 13 is positioned on an opposite position to the end part of the mirror 4 on the one direction side of the mirror rotating direction and an electrode 14 is positioned on an opposite position to the end part of the mirror 4 on the reverse direction to the one direction side of the mirror rotating direction. The mirror 4 is rotated by applying Coulomb force between respective electrodes 11, 14.;COPYRIGHT: (C)2004,JPO