ELECTRODE SYSTEM FOR ELECTRIC DISCHARGE TREATMENT. AND PLASMA DISCHARGE TREATMENT APPARATUS AND DISCHARGE TREATMENT METHOD USING THIS SYSTEM

摘要

PROBLEM TO BE SOLVED: To stably form plasma while reducing the usage of rare gas such as gaseous helium, and other gases permitting a glow discharge under the atmospheric pressure.;SOLUTION: The electrode system for the plasma discharge treatment which has a flow passage to introduce the discharge gas and the film-forming gas and a flow passage for discharging the gas after the treatment is characterized in that at least one electrode is formed of an electrode group consisting of a plurality of paralleled electrodes, and that at least one in the electrode group is arranged in a position nearer the base material to be treated than the other electrodes forming the electrode group.;COPYRIGHT: (C)2004,JPO