METHOD OF MANUFACTURING CERAMIC SPHERICAL MONODISPERSE PARTICLE, CERAMIC SPHERICAL MONODISPERSE PARTICLE MANUFACTURED BY THE METHOD AND APPARATUS FOR MANUFACTURING THE SAME

摘要

PPROBLEM TO BE SOLVED: To provide a method of manufacturing a ceramic spherical monodisperse particle by which the ceramic spherical monodisperse particle is stably and efficiently manufactured. PSOLUTION: A diaphragm 15 to which vibration caused by a piezoelectric actuator 12 is transferred through a transfer rod 14 vibrates in a pulse having the same frequency as that of the piezoelectric actuator 12 to cause a pulse pressure wave on slurry in contact with the diaphragm and the slurry in a slurry storage part 21a is ejected as slurry drops from an orifice on an orifice plate 23 once for every period of the pulse pressure wave caused in this way. The slurry drops freely fall down in a drying oven 42 kept at a prescribed temperature properly fixed to completely dry and remove the liquid component in the slurry drops in a recovering part C and in the meanwhile, are made spherical by the surface tension. The ceramic spherical monodisperse particle completely dried in this way is recovered in a recovering box 44. PCOPYRIGHT: (C)2004,JPO&NCIPI