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THIN FILM TRANSISTOR AND ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE USING SAME, AND METHOD FOR MANUFACTURING ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE
THIN FILM TRANSISTOR AND ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE USING SAME, AND METHOD FOR MANUFACTURING ACTIVE MATRIX TYPE LIQUID CRYSTAL DISPLAY DEVICE
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机译:使用该薄膜晶体管和有源矩阵型液晶显示装置的方法以及有源矩阵型液晶显示装置的制造方法
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摘要
PROBLEM TO BE SOLVED: To provide a thin film transistor and a method for manufacturing the same which is capable of resisting larger AC stress, and further having high performance and high reliability.;SOLUTION: An underlying insulating film 11 and a semiconductor layer 12 crystallized using an XeCl excimer laser are formed on a translucent glass substrate 10. A gate insulating film 13 and a gate electrode 15 are formed on the semiconductor layer 12. Impurities are ion-implanted into the semiconductor layer 12 using the gate electrode 15 as a mask. An interlayer dielectric 16, a source electrode 18, a drain electrode 19, and a passivation film 20 are formed on the gate electrode 15, and a deuteration treatment is then performed in a plasma atmosphere containing heavy hydrogen gas to combine heavy hydrogen with the grain boundary of the semiconductor layer 12 or a dangling bond of silicon (an interface state) existing on the interface between silicon and the gate insulating film 13. Thereby Si-D bonds 14 hard to be broken by an AC stress are formed.;COPYRIGHT: (C)2005,JPO&NCIPI
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