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Method for manufacturing micro probe, female substrate for manufacturing the same, and method for manufacturing probe having micro probe
Method for manufacturing micro probe, female substrate for manufacturing the same, and method for manufacturing probe having micro probe
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机译:微型探针的制造方法,母基板的制造方法以及具有微型探针的探针的制造方法
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摘要
A micro-tip is manufactured as follows. A recess portion is formed on a first substrate consisting of monocrystalline silicon for forming a tip. A peeling layer is formed on the recess portion. A contact layer is formed on at least a portion other than the peeling layer on the substrate. A tip material layer is formed on the peeling layer and the contact layer. The tip material layer on the peeling layer is transferred onto a second substrate. IMAGE
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