COMPRESSING METHOD APPLIED TO TUBE PUMP ETC. AND OPENING/CLOSING VALVE STRUCTURE

摘要

PROBLEM TO BE SOLVED: To provide an intermittent pump to feed liquid crystal, bio-substances, pharmaceuticals, chemicals, etc. while they are kept clean.;SOLUTION: A long stretching tube is held penetrating a pressurizing chamber, and opening/closing valves are installed at the ends of the tube, and the pressure in the chamber is increased or decreased, and the liquid in the tube is fed by increasing or decreasing the inside diameter of the tube in compliance with the pressure.;COPYRIGHT: (C)2004,JPO&NCIPI