MICROSCOPE, MICRO-PLASMA ARRAY FOR MICROSCOPE, METHOD OF OBSERVING SURFACE, AND METHOD OF REFORMING SURFACE

摘要

PROBLEM TO BE SOLVED: To provide devices and methods by which surface observation, surface reformation, etc., can be performed easily in a short time in a micrometer area or larger.;SOLUTION: A microscope comprises a micro-plasma array 10 constituted by erecting a plurality of probes 13 on a substrate 11, a gas introducing means which introduces a plasma generating gas to the vicinity of the micro-plasma array 10, and a high frequency impressing means which generates a plasma jet by ionizing the plasma generating gas by impressing a high frequency upon the array 10. The microscope also comprises an induced-current measuring means which measures a plasma-induced current generated between the micro-plasma array 10 and a sample X to be observed.;COPYRIGHT: (C)2004,JPO&NCIPI