RELATIVE INCLINED AMOUNT MEASURING METHOD OF ROUNDNESS FINDER, MEASUREMENT VALUE CORRECTING METHOD, INSPECTION TOOL,AND MANUFACTURING METHOD THEREOF

摘要

PROBLEM TO BE SOLVED: To provide a relative inclined amount measuring method for a roundness measurement device, along with a measurement value correcting method, an inspection tool, and a manufacturing method thereof, capable of acquiring reliable measurement result without increasing laborious processes and at a low cost.;SOLUTION: Related to first and second gauge blocks 41 and 42, in which the dimension between first and second reference surfaces, facing each other, is worked to a specified value, an inspection tool 4 fixed on both end faces of a cylinder 40 with their first reference surfaces 411 and 421 almost parallel to an inspection tool axial line S3 of the cylinder 40 is placed on a core-levelling table 21. Based on the location measurements of the first reference surfaces 411 and 421, a first relative inclined amount between a detector guide direction axial line S2 and an inspection tool axial line S3 is acquired. After the core-levelling table 21 is rotated by 180°, a second relative inclination amount between the detector guide direction axial line S2 and the inspection tool axial line S3 is acquired, based on localizing of second reference surfaces 412 and 422. A column relative inclined amount Q, between a table rotating shaft S1 and the detector guide direction axial line S2, is acquired based on the first and second relative inclined amounts.;COPYRIGHT: (C)2004,JPO