Apparatus and method for modeling the imaging effect and process effects in the scanning electron microscope

摘要

A method and apparatus for generating a test recipe for SOLVED] Measurement tool. The first plurality of reference images are designed to be used to produce a plurality of structures [MEANS FOR SOLVING PROBLEMS] on the sample is provided. Each structure is imageable to form a target image patterns. Test recipe used by the metrology tool to determine the structure of the sample on the created or modified. Changing or generating test recipe includes forming the at least a portion of the first reference image, the second plurality of reference images, and that is associated with a test recipe second reference image. The second reference image is formed to simulate at least partially process the one or more effects to be associated with manufacturing the structure of the sample. It can be formed to simulate the imaging effects of one or more and the second reference image further. [Selection] Figure Figure 1