UNEVENNESS INSPECTION DEVICE BY 2-DIMENSIONAL LASER DISPLACEMENT SENSOR

摘要

PROBLEM TO BE SOLVED: To provide a inspection device which can relieve a worker from validation working of a gauge measure which forces sequential viewing confirmation in a dark environment, cancel instablity of estimation caused by mechanical long term deterioration by non-contact instrumentation, and inspect unevenness of a surface to be inspected in a stable stste of high precision.;SOLUTION: A laser line generating part 2, 2 which is obliquely fixed and emits a laser slit light, and a two-dimensional laser displacement sensor which is constituted of a telecentric lens 2, 1 and a two-dimensional CD element 2, 3 and detects unevenness of an erosion part 1, 1 are used. While moving linearly on the erosion part 1, 1. the inspection device detects the unevenness, thereby detecting the deepest value of the erosion part of three-dimensional geometry.;COPYRIGHT: (C)2004,JPO