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On the photo-electric emission aspect and on the electronic tube null

机译:在光电发射方面和在电子管上无效

摘要

PROBLEM TO BE SOLVED: To provide a higher sensitive photoelectric emission surface having an active layer dissolving crystal defects and an electronic tube having the photoelectric emission surface. SOLUTION: On the photoelectron emission surface, an epitaxial layer formed by laminating a window layer 31 consisting of (Aly Ga1-y )x 'In1-x P and an active layer 32 consisting of Gax In1-x P in that order is closely provided through an antireflection film 20 on a glass face plate 10. A very thin surface layer 33 consisting of Cs2 O and an electrode 40 consisting of Cr and formed on the upper surface of the active layer 32 at the central part and the peripheral edge part. Crystal defects are dissolved in the active layer 32 in a range of an atomic composition ratio x of 0x=0.75, almost equal to the atomic composition ratio X' of the window layer, lengthening the diffusion length of a photoelectron generated by directing light to be detected, an object for detection, in the active layer 32. Thus, the photoelectric emission surface comes to higher sensitivity rather than conventional sensitivity. An electronic tube using the photoelectric emission surface detects weaker light rather than conventional light.
机译:解决的问题:提供具有溶解晶体缺陷的活性层的更高灵敏度的光电发射表面和具有光电发射表面的电子管。 SOLUTION:在光电子发射表面上,紧密地提供了一个外延层,该外延层是依次层叠由(Aly Ga1-y)x'In1-x P组成的窗口层31和由Gax In1-x P组成的有源层32形成的通过在玻璃面板10上的减反射膜20。在活性层32的上表面的中央部和周缘部形成有由Cs 2 O构成的非常薄的表面层33和由Cr构成的电极40。晶体缺陷以0 <x <= 0.75的原子组成比x的范围几乎等于窗口层的原子组成比X’的范围溶解在有源层32中,从而延长了通过定向产生的光电子的扩散长度。在有源层32中,作为检测对象的被检测光。因此,光电发射表面具有比传统灵敏度更高的灵敏度。使用光电发射表面的电子管可以检测到比传统光更弱的光。

著录项

  • 公开/公告号JP3565526B2

    专利类型

  • 公开/公告日2004-09-15

    原文格式PDF

  • 申请/专利权人 浜松ホトニクス株式会社;

    申请/专利号JP19960020122

  • 发明设计人 新垣 実;

    申请日1996-02-06

  • 分类号H01J1/34;H01J29/45;H01J31/50;H01J43/08;H01L31/08;

  • 国家 JP

  • 入库时间 2022-08-21 23:28:04

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