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METHOD AND PROGRAM FOR EXTRACTING FEATURE FOR DIAGNOSIS/MONITORING OF FACILITY OR INSPECTION OF DEFECTIVE/NON-DEFECTIVE PRODUCT FROM WAVEFORM PATTERN DATA
METHOD AND PROGRAM FOR EXTRACTING FEATURE FOR DIAGNOSIS/MONITORING OF FACILITY OR INSPECTION OF DEFECTIVE/NON-DEFECTIVE PRODUCT FROM WAVEFORM PATTERN DATA
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机译:从波形图案数据中提取特征以进行诊断/监测或检查有缺陷/无缺陷产品的特征的方法和程序
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摘要
PROBLEM TO BE SOLVED: To provide a method and a program for extracting from a time series waveform pattern features of a waveform pattern which represent intrinsic features of an object waveform pattern and also possess characteristics of temporal change or the like.;SOLUTION: The method includes a step for leveling the waveform pattern data, a step for calculating the difference between the original waveform pattern data and the leveled waveform pattern data; a step for selecting the waveform pattern data in a specified range in the vicinity of a time of interest with regard to the waveform pattern data obtained by the difference calculation and defining one or a plurality of sample lines with regard to the selected waveform pattern data; and a step for extracting a part or the whole of quantity of change in the waveform pattern data obtained by the difference calculation, an existence amount, the minimum value of the existence amount, the maximum value of the same, the start point of the waveform pattern, or the end point of the same, on the defined sample line.;COPYRIGHT: (C)2004,JPO
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